Product/Service

PTFE Carriers For Wafers and Substrates

Source: Engineering Plastics, Inc.
Custom Engineered PTFE carriers for wafers, substrates, flat panel displays, liquid crystal displays, and optical discs...

Featuring single-piece construction, these PTFE Carriers outlast fabricated or assembled cassettes because there are no pins, screws, or dovetails that can loosen and trap impurities or slow down critical processes. Machined to specification, PTFE carriers are available in standard, megasonic, and mask styles.

Compatible with all types of equipment, PTFE Carriers won't absorb and store contaminating fluids or liquids and can be rinsed clean with deionized water. Their inherent low coefficient of friction virtually eliminates particle shedding and contamination from carrier contact and, of course PTFE is chemically inert and unaffected by acids, alkalis, and all solvents below 300°C.

Key Features:

  • Chemically inert and operate from -240°C to +240°C
  • Machine compatible SEMI standard, megasonic, and mask styles
  • Precisely machined with customer required slot spacing
  • Fully dense and free of microvoids and microporosity
  • Can withstand ultrasonic cleaning and prebake operations
  • Single-piece molded and machined construction
  • Teflon tanks and special handles can also be fabricated

    Engineering Plastics, Inc., 190 Turnpike Road, PO Box 1440, Westboro, MA 01581-6440. Tel: 508-366-4425; Fax: 508-366-2575.