Predictive/Preventive Maintenance

Maintenance Planning

Checklist Development

• Uniquely named Checklists for each maintenance objective
  
• Each task summarized with detailed back-up Includes material and tool requirements
  
• Trigger points defined by date, number of days between checklist executions, number of runs between executions or a recipe related factor
  
• Commonly used checklists can be shared among all tools
  
• Checklist can be modified automatically for successive executions

• User defined warning level for each trigger-point allows coordination with the production schedule
  
• Stop level defined by the user inhibits further use of the tool until maintenance has been completed
  
• Implementation fits into current planning without changing existing schedules
  
• Weekly, monthly, quarterly and annual tasks can be automatically scheduled for the same maintenance session

• Statistical Machine Control option monitors user selected parameters versus defined limits
  
• Checklist is triggered only when the parameter change indicates the need
  
• Limit violation triggers a user selected checklist

• Detailed task descriptions guide the performance - Material list assures preparation
  
• User records task completion - allows easy resumption of interrupted sessions. Includes pass-down notes
  
• Explicit direction for both success and failure for each task
  
• Status display shows current condition versus the trigger point for each checklist for each tool

• Status display allows maitenance personnel to estimate checklist due dates
  
• Warning message issued at the beginning of each run until maintenance is completed
  
• User identifies checklists that may cause a stop of the tool
  
• A stop condition will inhibit the next start - either single wafer or batch run
  
• Stop can be overridden by production supervisor for hot lots

Semy Engineering, Inc., 2340 West Shangri La, Suite 201, Phoenix, AZ 85029-4747. Tel: 602-861-9395; Fax: 602-861-1442.