Precision Rotary-Only Manipulators
The company offers UHV-compatible Precision Rotary-Only Manipulators (PROMs) as a solution for achieving rotary motion in sealed chambers with minimal outgassing- essential for manufacturing processes operating at lower base pressures.
The company offers UHV-compatible Precision Rotary-Only Manipulators (PROMs) as a solution for achieving rotary motion in sealed chambers with minimal outgassing- essential for manufacturing processes operating at lower base pressures. The PROMs are constructed of materials with lower vapor pressures than the ferrofluid seals currently used in manufacturing processes. They also eliminate the failure modes typical of ferrofluid seals that can cause a leak. Many manufacturing processes in the semiconductor, disk sputter, and thin film industries operate at lower base pressures and are degraded by leaks within their HV chambers.
The design of PROMs incorporates a single machined piece of 304L stainless steel and metal or Viton seals, eliminating wear (of seals) due to motion. PROM seals are impervious to most liquids and gases, offer overdrive protection, and ensure that outgassing of residual oils and burping are eliminated.
Surface/Interface Inc., 260 Santa Ana Ct., Sunnyvale, CA 94086-4512. Tel: 408-732-7111. Fax: 408-732-7191.