Precision Magnetic Manipulators

Featured at Semicon West

The Surface/Interface Vacuum Products Group announces the introduction of a line of compact precision magnetic manipulators (PMMs). The Compact PMMs are new members of a family of PMM products that move samples in and out of both high vacuum and ultrahigh vacuum systems and control motion within those environments. Surface/Interface PMMs provide independent or simultaneous linear and rotary motions in a vacuum system and are used for actuating shutters or moving substrates as well as for sample introduction. PMMs are widely used in research labs, the semiconductor industry, and in the analytical laboratories of many industries.

Compact PMMs are suited for sample introduction via loadlock in SEM, surface analysis, semiconductor, and other thin film process systems. They can replace bellows and slide seals as a low-cost solution to avoid catastrophic leaks. The Compact PMM occupies less than 1/3 of the volume of a standard PMM manipulator, but the magnetic force and precision are comparable in magnitude. Compact and standard PMMs utilize end effectors to perform simple and complex motions in vacuum. The Compact PMM features a 114 in. manipulator rod that can be custom machined with threads, threaded holes, flats, and slots.

Surface/Interface Inc., 260 Santa Ana Court, Sunnyvale, CA 94086-4512. Tel: 408-732-7111; Fax: 408-732-7191