Polygen Systems
Source: Applied Materials, Inc.
The Polygen Centura is a 200mm and 300mm system for the deposition of polysilicon films, that provides film morphology control and uniform in-situ doping capability required for advanced transistor formation
Applied Materials, Inc. Centura is a 200mm and 300mm system for the deposition of polysilicon films, that provides film morphology control and uniform in-situ doping capability required for advanced transistor formation.
The systems offer control of polysilicon grain size and orientation, enabling chip manufacturers to tailor dopant distribution according to device requirements.
The systems offer control of polysilicon grain size and orientation, enabling chip manufacturers to tailor dopant distribution according to device requirements.
The systems' robust chamber design, based on xZ chamber architecture, enables controllable temperature uniformity for extremely uniform films. Extensive use of ceramic parts and in-situ chamber cleaning technology deliver extended operation with low particle and metal contamination levels.
<%=company%>, 3050 Bowers Ave., Santa Clara, California 95054. Tel: 408-727-5555; Fax: 408-986-8352
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