Product/Service

Point Source Systems

Source: SAL, Inc. (Semiconductor Advanced Lithography, Inc.)
SAL is proud to offer the first and only Point Source X-ray Lithography System
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SAL is proud to offer the first and only Point Source X-ray Lithography System, the SAL XRS2000 NanoPulsar System. The XRS2000 NanoPulsar System offers the benefits of X-ray lithography without the investment requirement of a synchrotron

http://www.xraylitho.com/XRS2000.jpg

SAL XRS2000 Nanopulsar System

The SAL XRS2000 NanoPulsar System is a fully-integrated lithography system including the XRS2000 stepper, a Dense Plasma Focus X-ray Point Source, an X-ray beamline and a robotic material handling system. The system is enclosed in a Class 1 minienvironment. SAL can integrate wafer process modules to add coating and baking capabilities. SAL can also interface with a lithography track or cluster tool to ensure a tightly controlled process with minimal labor interaction.

SAL, Inc. (Semiconductor Advanced Lithography, Inc.), 21 Gregory Drive, Suite 2, South Burlington, VT 05403. Tel: 802-652-0055; Fax: 802-652-0825.