Plasma Impedance Monitor
Source: Scientific Systems Inc.
The SmartPIM is an inline plasma monitoring device that fingerprints the plasma chamber through simultaneous meas-urement and display of current, voltage, and phase of the first five Fourier components
Scientific Systems Inc.M is an inline plasma monitoring device that fingerprints the plasma chamber through simultaneous meas-urement and display of current, voltage, and phase of the first five Fourier components. Based on its patented technology, Scientific Systems Inc.M can deliver a dynamic range of up to 140 dB, allowing engineers to achieve plasma process repeatability with precision and consistency.
The resolution afforded by Scientific Systems Inc.M makes the device suitable for production fabs that de-mand high yield, productivity, and efficiency, and for R&D facilities that require precise knowledge of key plasma parameters. The monitor is ideal for process fingerprinting, process endpoint detection, and process control.
The device installs easily on existing process tools, offering end users almost plug-and-play capability. Users can collect data on a laptop PC or integrate into existing data management structures.
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