Photolynx™ - Integrated OPC and MDP
Source: Numerical Technologies Inc.
Photolynx hybrid approach to OPC combines the accuracy of a model-based approach with the turnaround times associated with rules-based OPC approaches
Features:
- Shortens time-to-photomask
- Reads GDSII, writes MEBES (through CATS integration)
- Combines rule- and model-based OPC approaches
- Multi-threading capability
- Manufacturing-driven OPC engine is scalable for subwavelength
- Layer geometry sizing and Boolean operations
- Easily handles micro-loading effects
Numerical Technologies Inc., 70 W. Plumeria Drive, San Jose, CA 95134. Tel: 408-919-1910; Fax: 408-919-1920.
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