Product/Service

Photolynx™ - Integrated OPC and MDP

Source: Numerical Technologies Inc.
Photolynx hybrid approach to OPC combines the accuracy of a model-based approach with the turnaround times associated with rules-based OPC approaches
Features:
  • Shortens time-to-photomask
  • Reads GDSII, writes MEBES (through CATS integration)
  • Combines rule- and model-based OPC approaches
  • Multi-threading capability
  • Manufacturing-driven OPC engine is scalable for subwavelength
  • Layer geometry sizing and Boolean operations
  • Easily handles micro-loading effects
Photolynx hybrid approach to OPC combines the accuracy of a model-based approach with the turnaround times associated with rules-based OPC approaches. Photolynx also integrates its hybrid OPC approach with the CATS Manufacturing Data Preparation (MDP) software. CATS is the de facto standard product for preparing IC data for semiconductor manufacturing.

Numerical Technologies Inc., 70 W. Plumeria Drive, San Jose, CA 95134. Tel: 408-919-1910; Fax: 408-919-1920.