photolithography, lithography, wafers, SOI wafer, flat panel, aligning systems, steppers, scanners, mask aligner, step-and repeat, step-and-scan,
Source: Canon USA, Semiconductor Equipment Division
The Semiconductor Equipment Division of Canon U.S.A., based in Santa Clara, Calif., is a leading supplier of step-and-repeat and step-and-scan photolithography tools for exposing integrated circuit patterns onto silicon wafers and large active matrix liquid crystal (AMLCD) flat panel displays.
In addition to the recent company news and basic product information here, you will find more about Canon's unique advances in steppers, scanning steppers and mask aligners, and innovations in SOI wafers at our corporate website. You can also view information on our extensive training facilities and courses.
This website uses cookies to ensure you get the best experience on our website. Learn more