PEP Plus 3510
Due to improvements to both the platform and chamber, the PEP Plus 3510 is designed to offer higher productivity, improved reliability and lower cost per wafer than its predecessor.
The system leverages the company's production-proven, damage-free downstream microwave plasma technology, while incorporating a new, higher power generator and advanced robotics. The results of these improvements are higher resist removal rates, faster wafer handling and improved cost of consumables (CoC), which translate to lower cost per wafer processing for customers.
Enhancements introduced on the PEP Plus 3510 include a new high-powered microwave generator that improves photoresist removal rates and sophisticated digital calibration that extends magnetron lifetime and lowers the CoC. Improved photoresist removal rates combined with a faster robot have increased throughput by 20 percent over the PEP 3510A configuration. For Standard Mechanical InterFace (SMIF) customers, the option of a SMIF-ARM provides an extra throughput advantage.
The PEP Plus 3510 upgrade package will be available as an option for existing PEP 3510A systems. The new platform will replace the original PEP Platform on orders beginning in June 2000.
GaSonics International, 2730 Junction Ave., San Jose, CA 95134. Tel: 408-570-7400.