Patterned Wafer Inspection System

Featured at Semicon Europa

Inspex offers the Eagle, a new patterned wafer inspection system configurable for defect inspection of 300mm wafers. The Eagle has been expanded to handle and measure larger wafers. The technology platform of the system provides a combination of sensitivity and throughput, up to (60) 200mm wafers per hour or (35) 300mm wph at 0.1µm sensitivity. The system provides enhancements to every performance criteria for on-line inspection systems, such as sensitivity, throughput, defect review, data analysis, ease of use, reliability, and ergonomics.

New illumination and collection optics combine with state-of-the-art image processing to advance the sensitivity specifications. Continuous motion imaging and multi-tasking robotics enable the system to significantly surpass industry standard throughputs. On-line defect review and classification are performed with a new built-in, high-resolution microscope. Data analysis is executed using the Inspex Data Management System (DMS) software. Ease of use is improved through recipe automation and a Windows NT application designed for flexibility. Product reliability exceeds industry standards as a result of the component and system design requirements specified by Project 6000, an internal quality program at Inspex. The Eagle is being introduced with a specification of 2000 hours MTBF. Ergonomics have been improved by repackaging the system to meet the design requirements of SEMI S8-95.

Contact: Sabine Grothe, +49-89/45111-288, Fax: +49-89/45111-102