The purifier extends the life of optics used for DUV lithography by removing the contaminants found in N² and clean dry air (CDA).
Aeronex introduces the GateKeeper Optics Gas Series of purifiers designed specifically for Photolithography applications. The purifier extends the life of optics used for DUV lithography by removing the contaminants found in N² and clean dry air (CDA). The Optics purifier removes S0², SO², NOX, H²S, H۴, CO², siloxanes, hydrocarbons, ammonia, amines, acid gases, and alcohols to <500 ppt (part per trillion) levels. GateKeeper purifiers operate at ambient temperatures of-40° to 150° F (-40° to 65° C), require no heat or power, do not release hydrocarbons, and give the lowest cost-of-ownership of any gas purifier. Applications include all areas of photolithography and metrology where deposition of contaminants from CDA or Nz shorten tool life. Removal of these contaminants with an Aeronex Optics Gas Purifier prevents damage to optical components, light transmittance is increased, heat build up is prevented, and component life is lengthened. In addition, contaminants absorb UV light, which leads to variation and reduction in performance. Contaminant removal results in increased throughput and yield, extended tool life, and higher performance.
The GateKeeper Optics Gas Purifier is the first purifier designed specifically for purifying gas used in lithography equipment. Key attributes include the ability to work at ambient temperature, have low pressure drop, no power requirements, be insensitive to oxygen, yet be extremely effective in removing other contaminants to ppt levels.
The GateKeeper patented media does not contain hydrocarbons, NO,, or sulfur compounds that outgas during use. Aeronex products come on-line sooner so will not contaminate your process during initial conditioning. Special requirements such as diluted gases, mass flow controllers, and complicated temperature sensing equipment are not necessary. The optics purifier can be located at the point-of-use with no effect on temperature sensitive processes. The media is regenerable at Aeronex, which eliminates hazardous waste disposal issues.
Aeronex, Inc., 6975 Flanders Dr., San Diego, CA 92121. Tel: 858-452-0124; Fax: 858-452-0229.
