optical filters, excimer, laser optics, monochromators, imaging spectrographs

Acton Research is the premier manufacturer of high quality Deep UV optical components and DUV Spectrophotometers. Acton Research optical components include excimer / DUV laser optics with proven long lifetimes of more than 7 billion laser pulses (for 193nm maximum reflecting optics at 45 degrees AOI)! Excimer / DUV optics include high reflectance mirrors and coating and anti-reflection coatings for 157nm, 193nm, 248nm, 308nm and 353nm as well as everything in between. These components are used in a variety of applications including DUV microlithography and DUV based metrology systems. Acton Research also manufacturers VUV-UV-VIS optical filters available in a variety of bandwidths, as well as broadband mirrors and coatings. Acton Research optical components are used in a variety of OEM and research applications worldwide!

Acton Research also produces the CAMS-507 DUV Spectrophotometer. The CAMS-507 DUV provides reflectance, transmission and absorption measurements of optics, reticles, wafers and resists from 120-300nm, making it an ideal 193nm and 157nm optical metrology tool. It includes powerful, intuitive software, automated sample chamber and high level repeatability.

Other Acton Research spectroscopy products include SpectraPro® Series of multi-grating monochromators and imaging spectrographs as well as vacuum monochromators and spectroscopic accessories. Newly added to Acton Research's instrumentation product line are the economical, research-grade Spectrumm CCDs to integrate with Acton's imaging spectrographs.

N/A, 530 Main Street, Acton, MA 01720. Tel: 978-263-3584; Fax: 978-263-5086.