New SEMI-GAS Cabinet Combines Multiple Functions Into One System

Provides integrated source and distribution capability

Malvern, PA - SEMI-GAS Systems, a division of Applied Energy Systems, Inc, and a manufacturer of industry-leading ultra-high purity gas source and distribution systems, recently released a new custom gas source and distribution system that combines the functionality of multiple gas cabinets and valve manifold boxes into one dynamic system.

Via a single user interface, the new system controls the supply of several process gases to multiple points of use, or tool chambers, from both internal and external source supplies. The integrated system is perfectly suited for semiconductor process tool and research applications, by enabling the operator to quickly and easily switch between process gases for experimentation and recipe development.

The system features a large 12" color touch screen, with an intuitive graphic display system schematic, enabling complete control over all system operations. SEMI-GAS ensures long term and reliable service by using only the highest quality ultra-high purity fluid components.

Additionally, the system performs purging automatically and continuously monitors system conditions for alarms to ensure the safe handling of the process gases. The system includes a self-closing and self-latching door and is equipped with a UL-approved sprinkler for added safety. The enclosure is constructed of welded 11 Ga steel, measures 86" tall by 40" wide by 23" deep and includes 1/4" thick safety glass in the viewing window.

SEMI-GAS custom systems are engineered to be flexible, with many features and options available in the mechanical, electrical and enclosure design, as well as special features tailored to precisely meet customer needs.

SOURCE: Applied Energy Systems, Inc.