New Automated Surface Profilers for 200mm and 300mm Wafers
SANTA BARBARA, CA, April 18, 2000 — Veeco Metrology Group announces the introduction of new Dektak Series V stylus profiler systems for both 200 and 300mm wafers. First introduced in 1997, Dektak Series V profilers have been re-engineered from the foundation to enhance the capabilities and performance of the tools for semiconductor applications. This latest iteration of the field-proven Series V profilers incorporates many new features to heighten performance: new sensor technology, improved software interface, and more rigid frame structure.
The new LIS 3 (Low Inertia Sensor 3) sensor delivers lower noise characteristics, as well as ultra-low stylus forces down to 0.03mg, which translates to improved step height repeatability. In addition, the software interface features new multi-level database system capabilities, intuitive management of data storage and retrieval, and improved DekMap 3D Image Rendering software. The DekMap 3D software takes advantage of the industry's most accurate, linear encoded X-Y stage positioning system, with 0.25-micron resolution for higher resolution imaging and faster throughput. The Dektak Series V profilers also feature improvements to the ergonomics and system electronics for easier operation and maintenance. Finally, as a result of the new base and bridge casting, the structural integrity of the Dektak Series V profilers have been made to inhibit external resonant bias. The Dektak Series V profilers are available in various configurations from manually loaded systems for both 200mm and 300mm wafers in manual and fully automated cassette-to-cassette, SMIF and FOUP systems.
Veeco Instruments Inc., headquartered in Plainview, New York is a worldwide leader in metrology tools for the data storage, semiconductor and research and scientific markets; and process equipment etch and deposition tools for the data storage and opto-telecommunications markets. Manufacturing and engineering facilities are located in New York, California, Colorado, Virginia and Arizona. Global sales and service offices are located throughout the United States, Europe, Japan and Asia Pacific.
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