Neptune Series Cleaning Systems

Neptune series cleaning systems, which use Laminar Process Technology (LPT), will be initially distributed to the thin film memory disk media industry. This modular system provides process flexibility and reduced cost of ownership through reliability and high product yields.

The process fundamentals upon which LPT is based are simple yet effective. With process liquid flow rates as high as 200 L per min., tank recovery times and tank cleanliness levels are up to two orders of magnitude better than conventional overflow weir-style tanks. By re-circulating process liquids at such exceptional rates, the Neptune series cleaner reduces surfactant and DI water usage while increasing disk rinsing by approximately 438% beyond standard immersion-style tank designs in equivalent process times. Additionally, the design of the tool provides the capability of achieving a class 10 or higher process environment. These all equate to substantially higher levels of cleanliness for today's disk manufacturers.

At the rapid pace with which the memory storage and other high-tech industries are evolving, the product's designers considered process flexibility and a best-in-class cost of ownership a necessity. The cleaner features a modular configuration concept, which boasts total process flexibility for a wide range of cleaning applications. This affords manufacturers the luxury of making future process changes without making additional substantial capital investments. A multitude of product options, such as ultrasonics, megasonics, scrub-under immersion, and in-line process monitoring, allows Neptune series customers to custom-configure their cleaners.

SpeedFam International, Inc., 305 N. 54th St., Chandler, AZ 85226. Contact: Nanci Lund, 602-705-2403; Fax: 602-705-2070.