NanoSpec 9200

NanoSpec 9200 is an automated film metrology system designed to complement and improve equipment efficiency for semiconductor manufacturing. It provides IC manufacturers with the fastest, most reliable and cost-effective tool available for volume production. This workhorse system is capable of measuring over 200 wafers per hour, two to three times more wafers per hour than competitive platforms. The system's compact design offers the smallest footprint on the market, occupying less than half the amount of fab space as other comparable units.

Its synergy with the NanoSpec 9000 integrated metrology system allows for direct and complete recipe transferability; programs can be created on the standalone NanoSpec 9200 and transferred directly into the NanoSpec 9000 integrated system. The NanoSpec 9200 offers a spectral range of 400-800nm or 190-760nm, and uses advanced dispersion models and a patented absolute reflectivity measurement technique to measure a majority of the single and multi-layer film stacks used in IC production.

In addition, the NanoSpec 9200 conforms to the new SEMI Standard E95-0200, Human Interface Standard for Semiconductor Manufacturing Equipment, which calls for a unified graphical user interface (GUI) that is easy to use and globally applicable.

Nanometrics Inc, 310 Deguigne Drive, Sunnyvale, CA 94086-3906. Tel: 408-746-1600; Fax: 408-720-0196.