NanoSpec 9000i and 9000b

The first of the InTool family of integrated metrology systems, these compact thin film metrology systems are designed for integration into semiconductor processing equipment. Applications for the 9000 Series include CMP, CVD, etch, lithography and spin-on dielectric track systems. The systems can be configured to measure wafers up to 300 mm in diameter and use non-contact visible and/or deep-UV reflectometry to perform extremely fast and accurate measurements of film thickness and uniformity. The NanoSpec 9000 also comes with Fourier transform infrared (FTIR) technology, enabling the system to determine dielectric dopant concentration. Integrated metrology reduces the use of "monitor" wafers, provides start-up time and improves yield due to tighter process control. The NanoSpec 9000i is currently available exclusively on the Applied Materials Mirra Mesa CMP tool and the Producer CVD system.

Nanometrics Inc, 310 Deguigne Drive, Sunnyvale, CA 94086-3906. Tel: 408-746-1600; Fax: 408-720-0196.