Monitoring of Process Equipment

PRI Automation Inc.ctor system allows executives and managers responsible for the productivity of semiconductor fabrication plants to monitor and analyze fab performance from remote computers and portable communications devices like PDAs and the new generation of mobile phones.

The PRI e-Qonnector is a "Set Top Box" for semiconductor process tools. It acquires information from the tool's SECS interface, or directly from sensors on the tool, and publishes that information as web pages. It represents a new class of interface and integration products: Equipment Connectors; which provide the interconnect capabilities of station controllers, but using simpler implementation methods by taking advantage of recent develops in web technology. Observations of the tool information can then be made using any available browser technology from anywhere on the fab intranet.

Handheld computers and laptops, connected via radio frequency (RF) networks to e-Qonnectors can provide each operator with his or her own private display to whichever tool they wanted to access. In addition, each display can use the same control paradigm developed for browsing.

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