Model 9325 CMP Endpoint Process Control

The OPTIMA 9325 CMP endpoint process control solution monitors minute changes on the wafer with sensitive motor current sensors, and LUXTRON's patented algorithm software. The sensors monitor motor current changes from one layer of film to another as the wafer is polished, enabling the control system to pinpoint the endpoint signal real-time. This capability extends to multi-head tools with independent head control. The LUXTRON proprietary Windows™-based software is immune to noise and can adapt to changing conditions as the process drifts, enabling it to reliably detect endpoint from the process signal. The OPTIMA 9325, a "space saving" CMP motor current endpoint controller, is packed with all the features and benefits found in the OPTIMA 9300. It supports up to 8 sensors and includes one tile array board, RS-232, Ethernet connector ports, internal 1.44Mb floppy disk drive and a color touch screen display. Applications: Tungsten, Copper, Aluminum and STI

Luxtron Corporation, 2775 Northwestern Parkway, Santa Clara, CA 95051. Tel: 408-727-1600; Fax: 408-727-1677.