Model 35k Inert Gas Purifier

The GateKeeper Model 35K point-of-use filter purifier removes both gaseous impurities and particle contamination from inert gases. Even with high purity gas delivery systems, random gas handling mistakes or system upsets can lead to contamination of the gas system. Contaminants such as water and oxygen have been shown to disrupt processes such as CVD, epitaxy, and sputtering.

Using a proven patented technology, the GateKeeper purifier removes H₂0, 0₂, CO, CO₂, and H₂ to sub ppb levels. The optional 0.003 um all metal filter removes 99,9999999% of all particulate 0.003 Nm and larger. System upgrades are easy, because the GateKeeper Model 35K has the same footprint as most filter brands.

Unlike other purifiers, the GateKeeper purifier does not need to be heated and has a long life. The purifier body is constructed of 316L stainless steel, internally electropolished to 10 Ra and is welded, tested, and packaged in a cleanroom for maximum cleanliness. The purifying media does not contain organics that can outgas and can be factory regenerated for re-use.

Features

• Provides sub ppb pure gas
  
• Simple to install and operate
  
• Operates at ambient temperature
  
• Drop in replacement for most gas filters
  
• 316L stainless steel, internally electropolished construction
  
• Patented purifying technology
  
• Regenerable

Applications

• Sputtering
  
• CVD
  
• Epitaxy
  
• Analytical equipment
  
• Final safeguard on any process at point-of-use

Gas purification has been proven to:

• Increase product yields, gas system component life and reliability in semiconductor manufacturing
  
• Increase weld quality in high purity welding
  
• Increase the system sensitivity and reliability of analytical equipment

Aeronex, Inc., 6975 Flanders Dr., San Diego, CA 92121. Tel: 858-452-0124; Fax: 858-452-0229.