MKS to Exhibit New High Vacuum Transducer at Semicon Europa

BOULDER, COLORADO, January, 2003 -- MKS Instruments, Inc. - HPS Products is introducing the HPS® Series 909 Mini Ion Transducer at Semicon Europa Hall B1, Stand 400. The Series 909 is an integrated hot cathode sensor and electronics control package. The wide measurement range makes the HPS® Series 909 Mini Ion Transducer an ideal measurement tool for high vacuum applications, including pressure measurement of high vacuum chambers and control or start-up of high vacuum systems. The transducer includes a patent-pending degas function, digital communications, analog output and a setpoint.

The compact, Bayard-Alpert type Mini Ion Transducer will measure vacuum from 10-10 to 10-2 Torr. The electron bombardment degas function is pressure controlled (a patent pending feature), automatically stopping and restarting at preset pressures, allowing for automation of the degas function. Each 909 has two yttria-coated iridium filaments and a screen to shield the grid and filaments from large particles. Standard with the transducer is RS485 digital communications, allowing for adjustments and monitoring in real-time. For additional process control, the transducer includes semilogarithmic analog output and a relay set point.

The yttria-coated iridium filament is resistant to damage caused by high oxygen partial pressures and accidental exposure to atmosphere. The tube will operate accurately at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. Hot cathode vacuum measurement is based on the ionization probability of a gas in a defined volume. HPS® hot cathode sensors are Bayard-Alpert style, which utilizes a fine wire collector located in the center of a grid. Because of its small area, few x-rays hit the collector, and the gauge can measure pressures to very low levels.

MKS Instruments is the world's broadest provider of process infrastructure products and technologies that increase productivity in gas- and vacuum-based manufacturing. The products realized from the manufacturing processes controlled by MKS' products range from sophisticated semiconductor, data storage and medical devices to optical coatings. MKS supports its OEM and end-user customers around the world with extensive process applications expertise, world-class manufacturing and technical support.

Source: MKS Instruments, Inc.