MKS Offers High Accuracy, Broad Range, 4-in-1 Pressure Sensor
•Datasheet: HPS® Series 999 Quattro™ Vacuum Transducer
The HPS® Series 999 Quattro™ Vacuum Transducer from MKS Instruments combines all the pressure sensing technology required by today's advanced vacuum tools into one compact package with a single electronic interface. With absolute measurement between 10-10 and 1,000 torr and differential measurement between -760 and 760 Torr for atmospheric switching capabilities, the Quattro transducer uses several different technologies to provide highly accurate measurement in one smoothed output.A single HPS® Series 999 Quattro™ transducer has the ability to replace multiple sensors in a vacuum system, including: ionization and Pirani gauges, sub-atmospheric and atmospheric pressure measurement gauges, differential pressure gauges, and both differential and absolute pressure switches. This enables the end-user to save time, money, and valuable tool space. The self-calibration feature reduces maintenance and improves repeatability.
The one-of-its-kind Quattro™ transducer achieves the functionality of four sensors by integrating several of HPS' key technologies into a single compact gauge solution: a miniaturized hot cathode ionization sensor, the MEMS-based MicroPirani™ sensor (absolute pressure) and a unique piezo sensor (offering both differential and absolute sensor functions). In addition, the combination of the MicroPirani and the piezo sensor technologies provide atmospheric switching capabilities.
The Quattro transducer offers measurement accuracies between 1% and 15% of Reading, depending upon the range. Where the sensors' measurement capabilities overlap, the intelligence within the sensors uses both measurements to create a smooth and accurate transition between them. This eliminates the need for multiple sensors and simplifies their integration into a control system.
The HPS® Series 999 Quattro vacuum transducer is ideal for measuring the wide cyclic pressure ranges of PVD and Ion Implantation systems, and can monitor both process and transfer chambers. The compact package and simple, yet flexible, electronic interface make the 999 easy to integrate into complex semiconductor tools, saving valuable tool space and reducing cost of sales.
The Quattro transducer can be operated via digital communications (enabling the full functionality of the unit) or as an autonomous analog unit (simply providing pressure and three independent relays). The unique design of the Quattro also allows for a combined output (analog and digital).
•Datasheet: HPS® Series 999 Quattro™ Vacuum Transducer