MKS Micro-Baratron(R) Vista Pressure Transducer with Integrated Display for Surface Mount Gas Sticks

The new Micro-Baratron(R) Vista(TM) pressure transducer is a compact integrated gas pressure sensor for process tool manufacturers and gas delivery suppliers. The new transducer has a built in display and meets the requirements for space saving surface mount components that can be incorporated in 300mm tools. The 872B Micro-Baratron Vista can be easily installed on process tool gas delivery lines including gas box, gas panel, and gas delivery systems. Process tool designers now must provide systems for 300mm wafers that are no larger, and in some cases smaller, than the equivalent 200mm process tool. The figure of merit is the throughput divided by footprint area. For many tools that use process gases, a large amount of space is required for gas distribution systems, often aptly referred to as gas jungles.

To save space, the industry is moving away from gas supply systems connected with in-line fittings to more compact "gas sticks" with surface mount fittings. Using this streamlined design, individual components can be closely spaced yet easily removed. Two standard seal types are emerging, termed "C" (SEMI Standard PR3) and "W" (SEMI Standard PR3.1).

The Micro-Baratron Vista pressure transducer is less than five inches in overall height-the smallest integrated display sensor presently available-and is narrow enough to meet the 1-1/8" spacing requirement for easy downmount installation on a gas stick. The 15-pin D-type power connector is recessed on the side of the device and does not add additional height..

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