MKS Mass Flow Controllers Incorporated in Balzers Sprinter Series Optical Disk Coaters

<%=company1%>, a leading supplier of gas flow control products in the thin film and semiconductor industries, is proud to announce that Balzers Process Systems (BPS) in Liechtenstein has chosen MKS mass flow controllers (MFCs) for its Sprinter Series of sputtering systems. BPS has chosen to standardize on the MKS Model 1179 MFC, which features digital control and Profibus communication electronics, for its MiniDisc sputtering systems. BPS will also use the Model 1179 MFC in its future CD/DVD rewritable sputtering systems.

BPS is a leading manufacturer of thin film deposition equipment. The Sprinter Series is engineered for the deposition of thin films for optical storage media. The Sprinter 750 MiniDisc sputtering system is a vertical single-disk sputtering system that incorporates a new automated fast disk transfer system for horizontal loading and unloading.

These tools are supported by MKS at thin film media production facilities throughout the world. "MKS Instruments, Inc. is continuing to build on its strong base in the thin film industry," stated Frank Lowry, Director of Sales for Materials Delivery Products. "In particular, we have become a key player in the new digital MFC marketplace. To this end, MKS has expanded its sales and applications engineering resources."

The 1179A is a general-purpose mass flow controller that can measure and control the flow of gases in a wide variety of applications and is available with full-scale ranges from 10 sccm to 20 slm. It can provide fast, repeatable flow control rates as low as 0.02 sccm. These MFCs are direct "form-fit-function" counterparts to most common MFCs on the market today and are drop-in replacements in existing gas delivery lines.