MKS, Ion Systems Offers Ionizer For Flat Panel Display And Solar Markets

Wilmington, MA, - MKS Instruments, Inc., a provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, has introduced the Ion Systems AeroBar VF Model 5359 for eliminating static charge on glass panels in the flat-panel display industry, solar industry, and in other large surface applications. Its patent-pending nozzle technology improves efficiency and reduces maintenance costs and user-settable controls provide ultimate mounting flexibility with distances ranging from 50 mm to 1.5 m away from the panels, says the company source.

The Model 5359's unique nozzle technology provides better discharge time performance while reducing the number of emitters in half. This feature, when combined with the nozzles' quarter turn design, reduces the time, effort, and expense required to clean or replace points. The Model 5359 also uses significantly less clean dry air (CDA) than other ionizer systems, reducing long-term operating costs, which is vital to LCD and solar panel fabrications.

The new AeroBar system provides best-in-class ionizer efficiency. Power and timing controls provide a wide-range of performance settings to meet users' exact requirements for balance and decay times, and the Handheld Remote Model HHR2 allows users to adjust settings in almost any environment. The Model 5359 can be customized to fit the different glass substrate spacings in new generation FPD fabs.

SOURCE: MKS Instruments, Inc.