MKS, Ion Systems Introduces Ionizing Blower For ESD Control In Process Tools

Wilmington, MA - MKS Instruments, Inc. has introduced the Ion Systems Critical Environment In-tool Ionizing Blower Model 5822i. Designed for extremely tight ion balance, the small size of the Model 5822i ionizer makes it suitable for ESD control in process tools used in the hard disk drive, backend semiconductor and other automated manufacturing environments.

The Model 5822i ionizer's optional sensor input operates with the Novx Series 7000 Monitor, the Novx Series 3150/3350/3360 Monitors, and other industry-standard monitors to detect and correct any offset in the ion balance. The ionizer maintains a balance of <±1 volt or better with an external monitor and <±3 volt without. The internal automatic balance correction system ensures accurate ionization of the target, providing for significant improvement in ionization performance. The patent-pending collimator is installed over the fan and directs ionized air to the target, improving ion delivery and shortening decay times, as well as increasing the range of the 5822i ionizer. The separate control box allows the blower to be installed in small, hard-to-reach spaces without fitting additional connections or wiring.

The Model 5822i features a unique Hydro Wave bearing fan a facility monitoring system connection for remote monitoring of alarms at the tool or system level, audible and visual product balance and locked-fan alarms and low/off/fast fan speed control with an adjustable low fan speed trimpot. The ionizer is cleanroom compatible and RoHS compliant. 1 Hydro Wave bearing fan developed by Panasonic (NMB-Mat branded DC axial fans).

SOURCE: MKS Instruments