MKS, Ion Systems Introduces Digital Ionization Sensor

Wilmington, MA -- MKS Instruments, Inc. has introduced the Ion Systems Model 5200-SR Digital Ionization Sensor for use in semiconductor equipment front end modules (EFEMs) or in process modules. The 5200-SR Digital Sensor, combined with AeroBar ionizers and integrated IonMonitor software, provides the industry's only true closed-loop controlled ionization system. This guarantees that tool calibrations remain in compliance with industry guidelines such as SEMI E78. Compliance with E78 improves yield by minimizing particle attraction to wafers, as well as eliminating ESD damage during wafer handling.

The IonMonitor software runs on the tool controller and can be customized to integrate into any process tool controller using the software developer's kit. Setup and control is intuitive and conveniently performed. Ionization parameters are adjustable to be as detailed and customized as necessary to ensure the best uniformity in the face of changing conditions in wafer processing environments. The 5200-SR can be set to alarm at user-specified thresholds or under specified process conditions. The small footprint and flexibility in mounting position ensures ease of integration into almost all tool configurations. Sensor feedback indicates when preventive maintenance of the ionization system is necessary.

SOURCE: MKS Instruments