MKS Introduces The Elite RF Power Generator

A cost-effective, compact solution for photovoltaic, LED and semiconductor processing

Andover, MA,— MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced the elite RF Power Generator for amorphous Si PV, LED and MEMS applications. The elite generator's integrated, single PCBA design offers exceptional reliability, and its air cooled, compact, light weight design provides a cost-effective, easy-to-install solution for RF deposition and etch needs.

The elite RF generator is available in 2U full rack and 3U half rack enclosures to allow for rack mounting, and is available in power levels of 300W, 600W and 750W. The robust, full rack design eliminates cables and connectors, while the patented inductive clamp technology protects the generator from adverse VSWR load conditions. The air-cooled, single phase, efficient 13.56 MHz generator results in low cost-of-ownership.

The elite RF generator can be used for amorphous thin film solar manufacturing, LED passivation and etch, MEMS and semiconductor processes including PVD, CVD, ALD, strip and etch. The elite generator can also be applied for cleaning, surface treatment and coating of medical components; and back end electronic packaging.

SOURCE: MKS Instruments, Inc.