MKS Introduces Series 48 Heaters

Wilmington, MA -- MKS Instruments, Inc., a provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, recently introduced the Series 48 Heaters for semiconductor, biopharmaceutical, custom and R&D applications. Featuring an integrated temperature controller, user-friendly communication and display modules, insulated silicone heater mat, and enhanced safety elements, Series 48 Heaters provide more accurate temperature control and greater thermal uniformity for decreased tool downtime, claim the company sources.

The new control mechanism features a re-settable high temperature safety limit device that meets UL® 1998 and CE 60730 requirements. It eliminates the need for a thermal fuse and allows for easy reset after an over-temperature event, greatly reducing downtime potential. The Series 48 controller also provides dedicated mechanical relay output for high-low temperature alert, a no-arc relay for power switching, LEDs for local alarm indication and field programmable set points for adjustable temperature control. The optional display and communications upgrade modules can be easily installed in the field to provide a digital display, user adjustable control parameters, RS485 MODBUS communications and other interface features.

The Series 48 Heaters' control components are located inside the controller away from heat sources, extending the heater life. Silicone foam insulation bonded to the reinforced silicone heater mat results in external heater surfaces that are safe to touch and meet OSHA requirements. Additional features include a computer software interface for simplified heater control. Custom temperature control pre-sets are also available.

SOURCE: MKS Instruments, Inc.