MKS Introduces Ethernet-enabled Pressure Manometer For Real-Time Diagnostics

Wilmington, MA -- MKS Instruments, Inc. introduced the 600C eBaratron Capacitance Manometer, specially designed for networking with Ethernet communications devices for real-time diagnostics. The all-digital pressure manometer incorporates MKS's Baratron capacitance technology to deliver stable pressure measurements to many critical semiconductor and other advanced manufacturing processes. Now equipped with Ethernet communications, the new eBaratron manometer enables diagnostics on a real-time basis during processing, allowing users to perform system analysis and troubleshooting.

The advanced manometer can be either digitally networked or used as a stand-alone vacuum monitor. An embedded Internet web browser provides communications with a Windows-based PC. With a rapid datalogger (100 msec), the 600C eBaratron manometer performs detailed self-diagnostics and simplifies the troubleshooting of other system components.

Models can be heated to either 45°C or 100°C for use in harsh semiconductor and display manufacturing, as well as biopharmaceutical processes. Accuracy is better than 0.10% of Reading, while full scale ranges from 1000 to 0.02 Torr give the eBaratron manometer a wide application range. Its standard all-metal, all-welded pressure sensor has exceptional corrosion resistance from aggressive process gases. Additionally, the manometer incorporates an MKS patented particle sump to prevent process by-products from condensing on the diaphragm and causing drift.

The 600C eBaratron capacitance manometer is TOOLweb-compatible, so it can easily communicate with MKS gateways and hubs, such as SenseLink and Blue Box. It also has analog communications capability, making it a "drop-in" retrofit into existing process systems.

SOURCE: MKS Instruments, Inc.