Microscopic Stage

Featured at Semicon West

A precision programmable motorized stepper stage provides a 10 in. x 8.5 in. travel and is provided with all fittings for the user's specific microscope or optical system. The H116 stage is suited for applications involving relatively large items such as semiconductor wafers, flat panel displays, wafer masks, and printed circuit boards. It accommodates 8-in. wafers. The step size of the H116 stage can be as small as 0.1 µm. The H116b stage is available with a 2mm or 5mm pitch ball screw.

The H116 stage is manufactured using crossed roller ways, zero backlash recirculating ball screws, X and Y limit switches, and two high precision stepper motors. Standard wafer chucks and customized are available to suit any application. The stage can be driven by Prior's ProScan series of motor controllers or compatible systems. The controller can be accessed via an RS-232 serial port or with an optional joystick, trackball, or keypad. The keypad has built-in programs for quick and accurate inspection of wafers.

Prior Scientific Inc., 80 Reservoir Park Dr., Rockland, MA 02370-1062. Contact: Sean Condon, 781-878-8442; Fax: 781-8736.