Product/Service

Metrology Tool for Thin Film and Bulk Materials Characterization - IR-VASE

Source: J.A. Woollam Co.
Infrared-Variable Angle Spectroscopic Ellipsometer
Infrared-Variable Angle Spectroscopic Ellipsometer

The J.A. Woollam Company's IR-VASE is a metrology tool for thin film and bulk materials characterization. It is the first and only spectroscopic ellipsometer to cover the wide spectral range from 2 to 33 microns (300 to 5000 wavenumbers).

Exclusive Advanced Technology

  • Rotating Compensator ellipsometer
  • Widest spectral range of any IR ellipsometer (2 to 33 microns)
  • Unambiguous measurement of "Delta" data from 0° to 360° degrees.
  • Patented calibration routine ensures the highest quality data possible.
  • All wavelengths measured simultaneously.
  • Automated angle range from 30° to 90°, to provide optimum data on any material.

CHARACTERIZE THIN FILMS AND BULK MATERIALS:

1. Optical Constants (n and k)

2. Film Thickness (Single or Multilayers)

3. Material Composition

4. Chemical Bonding Information

5. Doping Concentration (resistivity)

  • HIGH SENSITIVITY TO ULTRA THIN FILMS. Spectroscopic ellipsometry measurements contain both "phase" and "intensity" information from the reflected light. The "phase" information (not available from FTIR reflectance or absorptance) is highly sensitive to ultrathin films.

  • OBTAIN ACCURATE OPTICAL CONSTANTS. The IR-VASE can be used to measure both n and k directly for materials over the entire range from 2 to 33 microns without extrapolating data outside the measured spectral range as with a Kramers-Kronig analysis. Perfect for thin films or bulk materials; including dielectrics, semiconductors, polymers and metals. The figure below is an example of optical constants obtained from a thin film (~40 nm) of poly-ethyleneterephthalate (PET) on optically thick gold.

  • NON-DESTRUCTIVE CHARACTERIZATION. Non-contact measurements of many different material properties; including thickness, optical constants, material composition, chemical bonding, doping concentration, and more. Measurements do not require vacuum and can be used to study liquid-solid interfaces, common in biological and medical applications.

  • NO BASELINE OR REFERENCE SAMPLE REQUIRED. Ellipsometry is a modulation technique that does not require baseline scans or reference samples to maintain accuracy. Samples smaller than the beam diameter can be measured because the entire beam does not need to be collected.

    J.A. Woollam Co., 645 M St., Suite 102, Lincoln, NE 68508. Tel: 402-477-7501; Fax: 402-477-8214.