MetaPulse 300
Source: Rudolph Technologies
MetaPULSE is an opaque film metrology tool that can simultaneously measure the individual thicknesses of five or more layers in a multi-layer metal film stack–on 300 mm product wafers
Rudolph TechnologiesLSE is an opaque film metrology tool that can simultaneously measure the individual thicknesses of five or more layers in a multi-layer metal film stack–on 300 mm product wafers. It provides high throughput, fully-automated thickness measurements with Angstrom accuracy and sub-Angstrom repeatability. A robust pattern recognition system allows accurate placement of its 10 µm measurement spot within existing metrology sites for reliable measurements.
This product also provides early detection of missing layers and problems due to poor adhesion and interlayer-reaction. It can determine the RMS roughness of surface and buried layers. These capabilities provide critical information about the product's film stack. This product uses picosecond ultrasonic laser sonar, a non-contact, non-destructive measurement technique based on laser-induced ultrasound.
<%=company%>, One Rudolph Road, Flanders, NJ 07836. Phone: (973) 691-1300. Fax: (973) 691-5480.