Metal Gas Filter

Featured at Semicon West

The compact Wafergard III NF-750 all metal gas filter offers particulate filtration for ultra-high purity gas lines where high flow and high temperature are encountered in the semiconductor processing environment. Half the size of other high capacity filters, the Wafergard III NF-750 Gas Filter features a sintered nickel media that provides <99.9999999% removal of all particles at 300sIpm and 99.9999% of particles at 750slpm. The membrane design improves corrosion resistance and offers compatibility with inert and reactive gases. The NF-750 Filter's compact size allows for easy installation into valve manifold boxes and replacement of existing Teflon resin-based filters. A housing design eliminates outgassing, reduces drydown time, and allows for high temperature baking and extreme pressure applications.

The Wafergard NF-750 Ultra-High Purity Gas Filter, developed under strict quality guidelines, is 5 in. in height and performance tests resulted in a significantly faster drydown than existing high purity filters offered in the market. A definite technological filtration breakthrough, the Wafergard III NF-750 Gas Filter surpasses all filter products used in ultra-high, high flow, and high temperature required in gas delivery systems.

Millipore Corp., Bedford, Massachusetts 01730-9125. Contact: Chuck Altman, 972-461-2272 or Joy Farber, 212-445-8151.