Metal Etch System

Applied Materials, Inc.he Metal Etch DPS Plus Centura is an advanced metal etch system that allows chipmakers to produce significantly more wafers per month in high volume production environments. Features include a VHP+ dual arm transfer robot, improved process capability, software enhancements, cooldown chamber and innovative chamber materials. It has a system throughput of more than 50 wafers per hour, extended Mean Wafers Between Cleans (MWBC), and uptimes of greater than 90 percent. Applied Materials, Inc.he productivity features of this system are also combined with advances in process technology to bring metal etching to the next level. Defect densities, a measure that becomes increasingly important as feature sizes drop below 0.25 micron, have been reduced on this system, for improved device yield in the fab. Reducing defect levels is especially critical to chipmakers as chip sizes continue to grow.

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