Product/Service

MegaBIP Cylinder Gases - Featuring Built-in-Purifier Technology

Source: Air Products and Chemicals, Inc.
Air Products' Built-In Purifier (MegaBIP) technology for semiconductor gases delivers high purity product with consistency
A Gas Delivery Revolution
Air Products' revolutionary Built-In Purifier (MegaBIP) technology for semiconductor gases delivers higher purity product with greater consistency through a purifying system contained within the gas cylinder.

Product Consistency
Laboratory experiments have shown that impurities in cylinder gases can increase as the contents of the cylinder are depleted. By containing a purifier system inside the cylinder package, product shelf life is extended, and the end user is protected against transient upsets as the cylinder contents are depleted.

Higher Purity
Superior gas purity can be obtained with the MegaBIP delivery system because gas purification processes are generally more efficient at higher pressures, and the cylinder represents the highest pressure in the gas distribution system.

Reliability
With the MegaBIP delivery system you can eliminate the costly, time-consuming maintenance required for in-line purifiers.

System Integrity
Unlike most conventional process gas purifiers, the purifiers contained in MegaBIP gases protect the entire process piping system. By incorporating a purifier inside the cylinder at the full source pressure, any moisture in the process gas stream is eliminated from the gas stream before it has any chance to contaminate the high pressure side of the gas distribution system.

Lower Costs
MegaBIP cylinder gases significantly reduce fab Cost-of-Ownership in the following areas:

  • More consistent wafer processing
  • Reduced capital costs
  • Lower maintenance costs
  • No purifier removal costs

More environmentally friendly

Air Products and Chemicals, Inc., 7201 Hamilton Boulevard, Allentown, PA 18195-1501. Tel: 610-481-4911; Fax: 800-880-5204.