MEBES 5000 Electronic-Beam Raster-Scan Pattern Generation System

The MEBES 5000 electronic-beam raster-scan pattern generation system includes a platform with a new layout, packaging, and exterior design. The look of the system includes a three-bay electronics chassis, a stand-alone operator console, and a redesigned workstation. The workstation is designed to improve system performance through better noise immunity, vibration isolation, and environmental control. The system offers glass-in glass-out automation with fully conditioned storage nests for 16 cassettes.

Designed to accept the company's file pattern format, Mode 5, which provides improved data compaction through an Etec proprietary data format, the system manages the much larger data files associate with advanced 0.18µ designs. Mode 5 format extends the MEBES format to support patterning substrates with a design grid. The enhanced speed of the system is derived from its 320 MHz dual Super Flash High-Throughput Memory (SFHTM) data path, which achieves 1.28 gigapixels per second data rates. This translates into throughput speed up to twice of the MEBES 4500S and eight times that of the MEBES 4500S and the MEBES 4500.

Etec Systems, Inc., 26460 Corporate Ave., Hayward, CA 94545. Contact: David Miller, 510-780-3710; Fax: 510-887-2870.