MDX Series DC Magnetron Drives 2.5 kW to 80 kW

Advanced Energy Industries, Inc.use a high-frequency conversion technique to provide tight regulation, high conversion efficiency, and low stored energy at the output. Using micro-processor control and a modular design, they are easy to use, maintain, and repair.

MDX power supplies provide reliable power for continuous hard use in a vacuum environment. As the industry leader, they are most commonly used as dc magnetron sputtering drives, delivering tight regulation, superior arc quenching, and low stored output energy. They are also well-suited as high-power bias supplies in hard-coat systems and RF sputtering and etching systems.

Features
Using our switchmode conversion modules, MDX supplies give users high efficiency from line to load. The high-frequency method ensures a rapid response to plasma load changes. The design reduces stored energy at the output by several orders of magnitude. The fast response time virtually eliminates line-induced surges and noise spikes.

Each MDX unit has a three-tap impedance-matching transformer. Models are available in high-, standard-, and low-Z transformer configurations. Users can accommodate load impedances requiring voltages from 400 V to 1250 V by selecting the proper unit and tap. Strike voltage is up to 1550 V in all ranges. Full-rated power is supplied throughout a tap range.

Advanced Energy Industries, Inc.use AE's Arc-Out arc-suppression circuitry, providing multi-level suppression and quenching of different types of arcs in the magnetron environment. In addition, Arc-Out circuits reduce target burn-in time and material loss. This feature also prevents dumping of energy into hot spots by sensing a change in current and immediately shutting the power off. Controlled start-up cools hot spots before power is turned back on, preventing renewed arcing.

Users can regulate output power by constant voltage, constant current, or constant power. The user can initiate control from the front panel, an analog interface connector, or an RS-232 port. Setpoint levels are maintained in non-volatile memory so you can recover from run interruptions and to ensure repeatability from run to run.

Optional Feature
The Arc-Check feature is a state-of-the-art companion to Arc-Out arc-suppression circuitry. This feature eliminates continuous low-impedance conditions. An automatic, controlled burst of high energy melts flakes in milliseconds and restores load impedance. Software-controlled timing eliminates prolonged overpowering and protects your valuable system components.

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