MBTC Controller for TMX
Source: Semy Engineering, Inc.
The Model Based Temperature Controller for TMX is designed to upgrade the existing tube controllers
The Model Based Temperature Controller for TMX is designed to upgrade the existing tube controllers in the SVG Thermco TMX Series 9000, 10000 and 12000 horizontal diffusion furnaces. This provides state-of-the-art model based control technology. The improved temperature control accuracy results in excellent process uniformity, both across the wafer and down the load. More importantly, the system improves furnace throughput by eliminating the time consuming profiling operations and the need to calibrate the 8-mV power supply.
Semy Engineering, Inc., 2340 West Shangri La, Suite 201, Phoenix, AZ 85029-4747. Tel: 602-861-9395; Fax: 602-861-1442.