News | November 11, 2010

Mattson Technology Ships Helios XP RTP System To Leading Chipmaker For Advanced Logic Device Production

Fremont, CA - (Marketwire) - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has shipped the Helios® XP rapid thermal processing (RTP) system to a leading chipmaker. The qualification system will be used for the manufacturing and development of advanced logic devices. Production revenues are expected to begin in 2011.

"The selection of the Helios XP demonstrates that our investments to extend our RTP portfolio into the logic and foundry markets are paying off and further reinforces Mattson Technology's progress in gaining share in these new markets," said Andreas Toennis, senior vice president and general manager of Mattson Technology's Thermal Products Group. "This leading chipmaker selected the Helios XP for its logic fab based on the proven reliability, high productivity, and superior process control that the tool demonstrated at its memory facilities."

Toennis continued, "The Helios XP's state-of-the-art temperature measurement and control system enables a broad temperature range that gives logic device makers the ability to cover the full array of advanced RTP applications, and its patented HotShield™ design produces repeatable within-wafer and wafer-to-wafer uniformity, eliminating pattern shift effects and enabling excellent process yields. The system's industry-leading thermal performance and significant cost-of-ownership advantage will help our long-time customer address the most demanding technical and economic challenges associated with advanced logic device manufacturing."

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10 K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

SOURCE: Mattson Technology, Inc.