Mark 50 Systems
CHA Mark 50 Systems are available with a wide range of options covering the spectrum from full computer control to manual operation, from production runs to small R&D quantities. They are economical, feature fast loading and unloading, offer broad process flexibility, and accommodate a variety of substrate sizes, shapes, and materials. Their efficiency of design, ease of operation, and unmatched reliability make them an excellent choice for a wide range of production applications.
Process Control System
The entire air-to-air deposition process can be automatically controlled by CHA's Siemens-based PLC/PC automation or CHA Auto Tech Controller. The control systems permit one-button, fully-automatic cycling of the system valves, as well as providing multi-function, semi-automatic control for process development and maintenance-type functions. Separate process control and source control modules are mounted in electronic rack assemblies located in proximity to the deposition chamber. This allows adjustments to be made as the process is observed.
The optional PLC/PC-based control system automatically controls each step in the air-to-air process, as well as providing a real-time, interactive flat panel display of system and status. DDE (Dynamic Data Exchange) is utilized between the process controller and the flat panel display. Visual and audible "pop up" screens keep the operator aware of system or process faults and include displays of sug gested corrective action. The computer employs the widely used Windows and Windows NT-based WonderWare and Seimens S-7 software, making operation of extremely user friendly.
Operation and programming access levels are controlled by password security. Programming data is entered from a disk, slideout keyboard, mouse, or screen function keys. Audible voice prompts are provided during operation and troubleshooting to assist the user. The prompts can be presented in either a male or female voice, as well as in a specified language. Provision can be made for closed-circuit video monitoring of source activity, and a bar code scanner is available for data entry and tracking or data logging. Stored data is easily called up and displayed in spreadsheet format. If trouble-shooting assistance is required, data can be sent to the factory for analysis.
Operator Convenience
The Mark 50 System incorporates a unique, patented slide-down door on the front of the chamber to minimize floor space requirements while providing ease of access. The system's chamber and fixturing are ergonomically designed to minimize operator fatigue while maximizing efficiency. For added convenience, wafer loading automation is available and a rear door is provided for greater flexibility in loading and unloading substrate materials. The two doors permit total access to sources, shutters, shielding, and other fixturing components so they may be easily serviced. Front and side view ports allow the operator to observe the deposition process in progress.
Cleanroom Installation
The space-efficient Mark 50 System is designed for ballroom or through-the-wall mounting to meet cleanroom requirements, while conserving valuable floor space. When the system is placed inside a cleanroom, The pumping stack and other associated equipment are closed off to meet cleanliness requirements. When in a through-the-wall configuration, the pumping stack and other associated equipment are easily accessible outside of the cleanroom for maintenance. Mated pairs of systems (right and left hand) can be provided.
CHA Industries, 4201 Business Center Drive, Fremont, CA 94538-6357. Tel: 510-683-8554; Fax: 510-683-3848.