Magnum
Source: Semitool, Inc.
Multimodule chemical processing platform combining solvent, acid and spin rinser/dryer capabilities into a single automated system for high throughput production, with flexibility for future expansion
Multimodule chemical processing platform combining solvent, acid and spin rinser/dryer capabilities into a single automated system for high throughput production, with flexibility for future expansion. 150mm, 200mm and 300mm capability.
Pre-W-Silicide (HF Vapor) / Pre-Salicide Clean / Metal etch / Pre-CVD clean / Pre-diffusion clean /Photoresist strip / Polymer removal / CMP clean / Reclaim
Pre-W-Silicide (HF Vapor) / Pre-Salicide Clean / Metal etch / Pre-CVD clean / Pre-diffusion clean /Photoresist strip / Polymer removal / CMP clean / Reclaim
Semitool, Inc., 655 West Reserve Drive, Kalispell, MT 59901. Tel: 406-752-2107; Fax: 406-752-5522.
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