Product/Service

Magnetic Bearing Turbodrag Pumps

Source: Pfeiffer Vacuum, Inc.
The magnetically suspended bearing turbodrag pumps are designed for semiconductor processes such as CVD, reactive ion etching, sputtering, ion implementation, diffusion, as well as industrial, acceleration and R&D applications
Pfeiffer Vacuum, Inc.cally suspended bearing turbodrag pumps are designed for semiconductor processes such as CVD, reactive ion etching, sputtering, ion implementation, diffusion, as well as industrial, acceleration and R&D applications. Three models are available including TMH 1600 MC, TMH 1000 MC and TMH 400 MC.

These pumps feature non-contact magnetic bearings that eliminate the need for lubricants. An internal pump surface coating protects against corrosion. These pumps combine a multiple-stage turbomolecular pump and Holweck type molecular drag pumping system. A digital controller provides control of Pfeiffer Vacuum, Inc.c bearings, pump performance and, in the event of a power failure, ensures continuous pump operation.

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