Macro Defect Inspection System

The 2401 automated macro defect inspection system is designed to replace inefficient manual macro after-develop inspection (ADI). This system is an automated inspection system able to detect and classify front-end macro lithographic defects, 50 microns and larger. This product captures more than 90 percent of all critical macro ADI defects, while providing comprehensive defect classification and yield information to reduce scrap and enable continuous process improvements.

To maximize detection of all critical macro ADI defect types, the 2401 incorporates both brightfield and darkfield inspection technologies. Its advanced analysis capabilities, 80 wafer-per-hour throughput and advanced detection algorithms ensure detection of individual or continued excursions on any wafer at every layer. A camera and optics calibration capability is designed into each tool, facilitating tool-to-tool matching, while a Windows NT user interface, recipe creation, on-line documentation and CD-ROM-based training all contribute to tool ease of use.

KLA-Tencor, 160 Rio Robles San Jose, CA 95134 Phone: (408)875-4200. Fax: (408)571-3030.