Product/Service

LX-1200 Series Liquid Mass Flow Controllers

Source: Aera Corporation
Liquid MFC's are used in applications where the source material is a liquid, but where the user prefers to control the flow of the liquid rather than the flow of its heated vapor
Liquid MFC's are used in applications where the source material is a liquid, but where the user prefers to control the flow of the liquid rather than the flow of its heated vapor. The LX-1200 and LX-1200C do not exhibit the bubble problems common to other liquid MFC's. The flow components and the flow path are designed to prevent bubble formation or bubble retention.

Design Features

  • Metal seals
  • Piezoelectric control valve
  • Small diameter, fast responding sensor
  • Selected surfaces can be electropolished and ultra-cleaned to an Ra of 1 microinch
  • Aera 20-pin D electrical connector

Aera Corporation, 8601 Cross Park Drive, Suite 110, Austin, TX 78754. Tel: 512-339-7100; Fax: 512-339-8889.