Luxtron and Invax announce alliance for in-situ wafer temperature measurement integrated into E-chucks

Luxtron Corporation, a supplier of in-situ metrology solutions, and Invax Technologies, a designer and manufacturer of electrostatic chuck (E-chuck) assemblies for the semiconductor industry, announce today a strategic alliance to develop in-situ wafer temperature measurement embedded into E-chucks.

The joint development effort will allow Invax E-chucks to measure wafer temperature by using Luxtron's unique Fluoroptic Thermometry technology. Abid Khan, President of Invax, explained the main benefits of the alliance's development, "With the addition of Luxtron's thermometry technology into our E-chucks we can deliver unprecedented real-time control of the wafer temperature, even under changing process conditions. This will enable better process uniformity and repeatability, tighter CD control and ultimately higher yields."

Luxtron's patented Fluoroptic temperature measurement technology uses probes that are immune to EMI and RF interference, electrically non-conductive and have a low thermal mass for quick response. The thermometry system is stable, self-calibrating and based on a temperature-sensitive, inert, ceramic sensor viewed by a fiberoptic probe.

Invax's innovative chuck design permits the Fluoroptic sensor to be integrated into their E-chuck assemblies. This provides access to the wafer backside for direct temperature measurement. According to Edwin Oh, Luxtron's President, "Our Fluoroptic technology has always been used by the semiconductor industry for process measurement, especially in R&D, but the ultimate challenge has been to measure actual wafer temperature. By working with Invax, our technology will allow actual wafer temperature to be measured in-situ to temperatures as low as –200°C."

Luxtron is a leading supplier of in situ process technology for the semiconductor industry. Its products give users the ability to monitor processes and measure temperature in harsh environments with extraordinary accuracy. Luxtron's yield-enhancing products fall into two categories: temperature measurement and end point process control. Fiberoptic temperature sensors are used in plasma etch, chemical vapor deposition (CVD), physical vapor deposition (PVD), epitaxy (EPI), rapid thermal processing (RTP) and diffusion processes. In situ endpoint monitors detect process endpoints in plasma etch, wet etch and chemical mechanical planarization (CMP) systems.

Invax Technologies is a manufacturer and supplier of Electrostatic Chucks (ESCs) and other enabling technology modules to the semiconductor processing industry worldwide. Their ESC assemblies are used in a diverse range of applications including:oxide, metal and polysilicon plasma etching; CVD; PVD; e-beam and EUV lithography; and e-beam inspection.

Luxtron Technologies, 2775 Northwestern Parkway, Santa Clara, California 95051-0941; Phone: 800-627-1666;

Invax Technologies, 233 Weddell Drive, Sunnyvale, California 94089; Phone: 408-745-6240.

Edited by Paul O'Shea