LT - 210
Source: Semitool, Inc.
Single substrate processor
Single substrate processor. Fully automated platform for high throughput production of Cu Interconnect devices. Utilizing Semitool's advanced electrochemical deposition technology.
Electrochemical deposition(ECD) / Cu Dual Damascene / Copper / Gold / Solder
Electrochemical deposition(ECD) / Cu Dual Damascene / Copper / Gold / Solder
Semitool, Inc., 655 West Reserve Drive, Kalispell, MT 59901. Tel: 406-752-2107; Fax: 406-752-5522.
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