Product/Service

Low-Frequency Sinusoidal Power

Source: Advanced Energy Industries, Inc.
AE's Crystal series of power supplies provide wide range, low frequency sinusoidal process power for dual-magnetron sputtering applications.
Advanced Energy Industries, Inc.l series of power supplies provide wide range, low frequency sinusoidal process power for dual-magnetron sputtering applications. The Crystal platform is currently available in 120 kW and 180 kW power levels. Each power supply is a single unit—designed for rugged use in industrial environments. The platform enables superior quality film deposition with minimal stored energy as well as exceptional arc control. These power supplies offer process engineers the ability to improve process yield and quality in existing sputtering system or in a new system.

Some highlights of the platform are its ability to delivery full power over a wide impedance range, its exceptional arc handling, and its overall line to output efficiency. For example, both the 120 kW and the 180 kW models can deliver full power into a 300 Vac to 1200 Vac range, and all models operate at a greater than 80% efficiency, thereby, substantially lowering your cost of ownership.

Benefits

  • Wide output voltage tap range of 300 Vac to 1200 Vac
  • Efficiency greater than/equal to 80%
  • Enables superior quality film deposition
  • Minimal stored energy
  • Superior arc control
  • Standardized modules for easy serviceability and the ability to "grow" larger process power systems
  • Single unit for rugged use in industrial environments

Features

  • High power from 120 kW to 300 kW
  • Wide tap range for extended target life
  • High efficiency
  • Low stored energy and superior arc control minimizes arc damage
  • Regulation on power, current, or voltage delivered to the load
  • Low cost of ownership
  • Power output is matched to the load through an internal load-matching transformer which provides impedance matching through mechanical changing of the transformer taps
  • Dual floating output configuration
  • Control flexibility with three control options including: the power supply's own remote operator control panel, the user port interface, and the host port interface
  • Industrial cabinet can withstand harsh factory environments
  • Water cooled using a sealed water distribution system

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