Lot and Reticle Auto ID System

Semicon Japan: The company offers the ST-8400 SMART-Tag the latest addition to its SMART-Traveler System family of products for use in semiconductor manufacturing. The ST-8400 SMART-Tag enables chipmakers to more accurately identify wafer or reticle lots and communicate process information, which can reduce misprocessing and misrouting of work in process in their fabs. As a result, semiconductor manufacturers can gain an overall improvement in equipment efficiency and yield.

As semiconductor fabs become increasingly automated, device manufacturers are seeking more sophisticated auto ID technologies to ensure fast and accurate identification of work-in-process as it moves throughout the fab. The SMART-Tag is a small battery-operated microcomputer, which, when attached to SMIF-Pods and other wafer carriers, communicates lot identification and process information to the operator, process tool and host.

Asyst Technologies, Inc., 48761 Kato Rd., Fremont, CA 94538. Tel: 510-661-5000. Fax: 510-661-5166.